Shrinkage Analysis of Carbon Micro Structures Derived from SU-8 Photoresist
نویسندگان
چکیده
منابع مشابه
Multiscale carbon structures fabricated by direct micropatterning of electrospun mats of SU-8 photoresist nanofibers.
A novel method for the direct fabrication of arrays of micropatterned polymeric and carbon nanofiber structures on any substrate is developed. First SU-8, an epoxy-based negative photoresist, is electrospun under optimized conditions to produce a layer of polymeric nanofibers. Next, this nanofibrous mat is micropatterned using photolithography, and finally, pyrolysis produces ordered arrays of ...
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ژورنال
عنوان ژورنال: ECS Transactions
سال: 2016
ISSN: 1938-6737,1938-5862
DOI: 10.1149/07201.0027ecst